Keywords

sensors, integrated optics devices

Abstract

We demonstrate an in-plane photonic transduction method for microcantilevers, which have been widely investigated for sensor applications. In our approach the microcantilever is etched to form a single mode rib waveguide. Light propagates down the microcantilever and crosses a small gap at the free end of the microcantilever, some of which is captured by an asymmetrical multimode waveguide that terminates in a Y-branch. The Y-branch outputs are used to form a differential signal that is monotonically dependent on microcantilever deflection. The measured differential signal matches simulation when microcantilever rotation is properly accounted for. The measured differential signal sensitivity is 1.4 x 10-4 nm-1 and the minimum detectable deflection is 0.35 nm.

Original Publication Citation

J. W. Noh, R. Anderson, S. Kim, J. Cardenas, G. P. Nordin, "In-plane photonic transduction of silicon-on-insulator microcantilevers," Optics Express 16(16), pp. 12114-12123 (28). http://www.opticsexpress.org/abstract.cfm?uri=oe-16-16-12114.