Keywords
x-rays, soft x-rays, extreme ultraviolet (EUV), ellipsometry and polarimetry, optical properties, metals, harmonic generation and mixing
Abstract
We use laser high-order harmonics and a polarization-ratioreflectance technique to determine the optical constants of copper and oxidized copper in the wavelength range 10-35 nm. This measurement resolves previously conflicting data sets, where disagreement on optical constants of copper in the extreme ultraviolet most likely arises from inadvertent oxidation of samples before measurement.
Original Publication Citation
Nicole Brimhall, Nicholas Herrick, David D. Allred, R. Steven Turley, Michael Ware, and Justin Peatross, "Measured Optical Constants of Copper from 1 nm to 35 nm," Optics Express, Vol. 17 Issue 26, pp.23873-23879 (29).
BYU ScholarsArchive Citation
Allred, David D.; Brimhall, Nicole; Herrick, Nicholas; Peatross, Justin; Turley, R. Steven; and Ware, Michael, "Measured Optical Constants of Copper from 10 nm to 35 nm" (2009). Faculty Publications. 874.
https://scholarsarchive.byu.edu/facpub/874
Document Type
Peer-Reviewed Article
Publication Date
2009-12-15
Permanent URL
http://hdl.lib.byu.edu/1877/2675
Publisher
Optical Society of America
Language
English
College
Physical and Mathematical Sciences
Department
Physics and Astronomy
Copyright Status
© 2009 Optical Society of America. This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/search.cfm. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Copyright Use Information
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