Keywords

python, ALS, reflectance, XUV, VUV, fitting

Abstract

This article describes how to use the python refl library in https://bitbucket.org/steve_turley/reflectance-fitting to fit thin film reflectance data from the Advanced Light Source (ALS) at Lawrence Berkeley National Labs. It uses data taken for a thin film of aluminum capped by a thin film of aluminum fluoride on a silicon nitride substrate. The single fit in the example shown here shows the importance of taking into account the oxidation of the aluminum layer as part of the fit.

Document Type

Report

Publication Date

2018-04-27

Permanent URL

http://hdl.lib.byu.edu/1877/4048

Language

English

College

Physical and Mathematical Sciences

Department

Physics and Astronomy

University Standing at Time of Publication

Full Professor

Included in

Physics Commons

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