We have fabricated nanofuses from thin-film, arc-evaporation carbon for use in permanent data storage. Thin film carbon fuses have fewer fabrication barriers and retain the required resistivity and structural stability to work as a data storage medium. Carbon thin films were characterized for their electrical, microstructural, and chemical bonding properties. Annealing the thin-film carbon in an argon environment at 400°C reduced the resistivity from about 4*10-2 Ω cm as deposited down to about 5*10-4 Ω cm, allowing a lower blowing voltage. Nanofuses with widths ranging from 200 nm down to 60 nm were fabricated and tested. They blow with voltages between 2 V and 5.5 V, and the nanofuses remain stable in both a "1" and a "0" state under a constantly applied read voltage of 1 volt for over 90 hours, corresponding to a cumulative time of >1012 reads.
College and Department
Physical and Mathematical Sciences; Physics and Astronomy
BYU ScholarsArchive Citation
Laughlin, Kevin Robert, "Thin Film Carbon Nanofuses for Permanent Data Storage" (2018). Theses and Dissertations. 6793.
nanofuse, permanent, data storage, fabrication, electron beam lithography, carbon