Abstract

This work investigates SU-8 polymer waveguides as a fabrication platform for integrated optical structures. Surface roughening using oxygen plasma etching is used to induce controlled optical scattering, enabling direct observation of guided modes and providing insight into waveguide behavior. Building on this, waveguide geometry is modified through an elevated scattering region (ESR) design, which reduces transition losses and improves scattering efficiency by preserving optical volume within the guiding region. In parallel, suspended SU-8 membranes are fabricated and evaluated for mechanical stability, providing a platform for integrating optical structures beyond conventional substrate-bound configurations. These membranes are further characterized under electrostatic actuation, demonstrating controlled mechanical deflection within the fabricated structures.

Degree

College and Department

Ira A. Fulton College of Engineering; Electrical and Computer Engineering

Rights

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