Systems, Models, and Simulation for Novel Microfabrication of Silicon Carbide and Metal Mesh Filters
Abstract
As the boundaries of Moore's Law rapidly approach, research is increasingly turning to exotic materials and metamaterials to advance the capabilities of electronic and micromechanical systems. This thesis presents systems, models, and simulation techniques for novel microfabrication in the realms of silicon carbide (SiC) and metal mesh filters. Through the unification of femtosecond laser pulses, high numerical aperture (NA) objective lenses, and system power and motion control, a system capable of achieving arbitrary 3D features without line-of-sight with aspect ratios up to 109:1 in SiC is developed. Additionally, a model of a direct-write femtosecond-laser-ablation fabricated metal mesh filter (MMF) is simulated in ANSYS High Frequency Structure Simulator (HFSS) and validates the novel fabrication technique. Finally, a transmission-line-theory based MMF model is presented as an alternative to modelling multilayer filters in HFSS. This model produces comparable results to an HFSS simulation with dramatically reduced computational intensity.
Degree
MS
College and Department
Ira A. Fulton College of Engineering; Electrical and Computer Engineering
Rights
https://lib.byu.edu/about/copyright/
BYU ScholarsArchive Citation
Stevenson, Hunter R. J., "Systems, Models, and Simulation for Novel Microfabrication of Silicon Carbide and Metal Mesh Filters" (2024). Theses and Dissertations. 10333.
https://scholarsarchive.byu.edu/etd/10333
Date Submitted
2024-04-16
Document Type
Thesis
Handle
http://hdl.lib.byu.edu/1877/etd13171
Keywords
silicon carbide, two photon absorption, terahertz filters, metal mesh filters, HFSS, transmission lines
Language
english