Abstract

This thesis presents the theory design and fabrication of a diffractive grating coupler. The first part of the design process is to choose the period of the grating coupler based on the desired coupling angle. The second part of the design process is to choose the geometry of the grating that gives maximum coupling efficiency based on rigorous analyses.

The diffraction gratings are fabricated by recording the interference between two waves in photoresist. The waveguide is fabricated from silicon nitride that is deposited by chemical vapor deposition. The diffraction grating recording assembly is described along with the grating coupler fabrication process. A grating coupler is fabricated with an input coupling efficiency of 15% at a coupling angle of 22.9°. The results also show that the light is being coupled into the nitride waveguide indirectly. The light is coupled first into a photoresist slab and then into the nitride waveguide through modal coupling and scattering. An analysis of the structure explains the coupling, and rigorous analyses are given to show that the measured results are in accordance with theory.

Degree

College and Department

Ira A. Fulton College of Engineering and Technology; Electrical and Computer Engineering

Rights

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