Title

Microfabrication with smooth thin carbon nanotube composite sheets

Keywords

carbon nanotubes, composite materials, microfabrication, patterning, carbon nanotube composites, MEMS, plasma etching

Abstract

Carbon nanotube (CNT)/polymer composite materials can be high strength, stiff, and lightweight, which makes them attractive for fabrication of micromechanical structures. Here we demonstrate a method whereby smooth, thin, high CNT concentration composite sheets can be fabricated and patterned on the microscale using a process of photolithography and plasma etching. Two types of CNT/polymer composite sheets were fabricated: one made from CNTs grown on patterned supported catalyst and one made from CNTs grown with floating catalyst; these had thicknesses of 6 µm and 26 µm respectively and a roughness of less than 60 nm.

Original Publication Citation

Boyer, N., Pei, L., Rowley, J., Syme, D., Liddiard, S., Abbott, J., Larsen, K., Liang, R., Iverson, B., Vanfleet, R., and Davis, R., 2017, "Microfabrication with smooth thin carbon nanotube composite sheets," Materials Research Express, Vol. 4, pp. 035032. DOI: 10.1088/2053-1591/aa55a4

Document Type

Peer-Reviewed Article

Publication Date

2017-03-22

Publisher

IOP

Language

English

College

Ira A. Fulton College of Engineering and Technology

Department

Mechanical Engineering

University Standing at Time of Publication

Associate Professor

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