Microfabrication with smooth thin carbon nanotube composite sheets
carbon nanotubes, composite materials, microfabrication, patterning, carbon nanotube composites, MEMS, plasma etching
Carbon nanotube (CNT)/polymer composite materials can be high strength, stiff, and lightweight, which makes them attractive for fabrication of micromechanical structures. Here we demonstrate a method whereby smooth, thin, high CNT concentration composite sheets can be fabricated and patterned on the microscale using a process of photolithography and plasma etching. Two types of CNT/polymer composite sheets were fabricated: one made from CNTs grown on patterned supported catalyst and one made from CNTs grown with floating catalyst; these had thicknesses of 6 µm and 26 µm respectively and a roughness of less than 60 nm.
Original Publication Citation
Boyer, N., Pei, L., Rowley, J., Syme, D., Liddiard, S., Abbott, J., Larsen, K., Liang, R., Iverson, B., Vanfleet, R., and Davis, R., 2017, "Microfabrication with smooth thin carbon nanotube composite sheets," Materials Research Express, Vol. 4, pp. 035032. DOI: 10.1088/2053-1591/aa55a4
BYU ScholarsArchive Citation
Boyer, Nathan Edward; Pei, Lei; Rowley, Joseph; Syme, Derric; Liddiard, Steven; Abbott, Jonathan; Larson, Kyle; Liang, Zhiyong; Iverson, Brian; and Vanfleet, Richard R., "Microfabrication with smooth thin carbon nanotube composite sheets" (2017). Faculty Publications. 3681.
Ira A. Fulton College of Engineering and Technology
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