Keywords

aluminum oxidation evaporation thickness

Abstract

This paper computes the oxidation rate of bare evaporated aluminum thin films under high vacuum conditions and exposed to air.

Document Type

Report

Publication Date

2017-11-22

Language

English

College

Physical and Mathematical Sciences

Department

Physics and Astronomy

University Standing at Time of Publication

Full Professor

1216alPlusOxide.csv (1 kB)
digitized data from Madden article

Al2O3Air.csv (1 kB)
digitized data from Madden article

vacuum oxide.csv (1 kB)
computed oxide thickness in vacuum

air oxide.csv (1 kB)
computed oxide thickness in air

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