polarization filter, subwavelength gratings, wire grid polarizer


We have stacked subwavelength gratings (SWGs) on a single substrate to create a compact, integrated circular polarization filter. The SWGs consist of a wire grid polarizer and a broadband form-birefringent quarter-wave plate (QWP). Rigorous coupled-wave analysis was used to design the QWP for operation over the 3.5-5.0 m wavelength range. The fabricated silicon broadband QWP exhibited a phase retardance of 82-97° across this wavelength range. Two stacked structures are presented, each with a different wire grid polarizer fabricated on an organic planarization layer (SU-8) that is deposited on a QWP grating. Transmittance measurements of the first structure when illuminated with nominally right- and left-circularly polarized light indicate a circular extinction ratio (CER) limited by the low linear extinction ratio of the polarizer. Use of a wire grid polarizer with a higher extinct ratio led to a stacked SWG structure that demonstrated CERs of 10-45 across the 3.5-5.0 m wavelength range.

Original Publication Citation

P. C. Deguzman and G. P. Nordin, "Stacked Subwavelength Gratings as Circular Polarization Filters," Appl. Opt. 4(31), pp. 5731-5737 (21)

Document Type

Peer-Reviewed Article

Publication Date


Permanent URL


Optical Society of America




Ira A. Fulton College of Engineering and Technology


Electrical and Computer Engineering