Keywords
Ion-association, Molecular dynamics
Abstract
In superconformal filling of copper-chip interconnects, organic additives are used to fill high-aspect-ratio trenches or vias from the bottom up. In this study we report on the development of intermolecular potentials and use molecular dynamics simulations to provide insight into the molecular function of an organic additive (3-mercaptopropanesulfonic acid or MPSA) important in superconformal electrodeposition. We also investigate how the presence of sodium chloride affects the surface adsorption and surface action of MPSA as well as the charge distribution in the system. We find that NaCl addition decreases the adsorption strength of MPSA at a simulated copper surface and attenuates the copper-ion association with MPSA. The model also was used to simulate induced-charge effects and adsorption on a nonplanar electrode surface.
Original Publication Citation
J. Chem. Phys. 128, 044717 (2008); https://doi.org/10.1063/1.2824928
BYU ScholarsArchive Citation
Guymon, Clint G.; Harb, John N.; Rowley, Richard L.; and Wheeler, Dean R., "MPSA effects on copper electrodeposition investigated by molecular dynamics simulations" (2008). Faculty Publications. 6528.
https://scholarsarchive.byu.edu/facpub/6528
Document Type
Peer-Reviewed Article
Publication Date
2008-01-31
Publisher
The Journal of Chemical Physics
Language
English
College
Ira A. Fulton College of Engineering
Department
Chemical Engineering
Copyright Status
© 2008 American Institute of Physics.
Copyright Use Information
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