Keywords

micro force measurement, error analysis, uncertainty, reliability

Abstract

Surface micromachining of micro-electro-mechanical systems (MEMS), like all other fabrication processes, has inherent variation that leads to uncertain material and dimensional parameters. By considering the effects of these variations during the design of micro force gauges, the gauge uncertainty and reliability can be estimated. Without means of calibrating micro gauges, these effects are often significant when compared to experimental repeatability. The general force gauge model described in this paper can be used to measure a wide range of forces, and simple design changes can lead to improved accuracy in measurement. A method of probabilistic design is described that is not limited to small beam deflections.

Original Publication Citation

Wittwer, J.W., Gomm, T., and Howell, L.L., “Surface Micromachined Force Gauges: Uncertainty and Reliability,†Journal of Micromechanics and Microengineering, Institute of Physics, Vol. 12, No. 1, pp. 13-2, 22.

Document Type

Peer-Reviewed Article

Publication Date

2002-01-01

Permanent URL

http://hdl.lib.byu.edu/1877/1164

Publisher

Institute of Physics

Language

English

College

Ira A. Fulton College of Engineering and Technology

Department

Mechanical Engineering

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