Keywords
gratings, optical polymers, PFCB, soft lithography
Abstract
Optically diffractive line gratings with 0.58- m feature sizes have been generated in 100- m perfluorocyclobutane (PFCB) polymer films by direct micromolding using only a silicon master. Strong reflectivities from the green to red portions of the visible spectrum, depending on incident beam angle, were observed with 3 dB bandwidths of approximately 30 nm. This negative mold-free technique permits, for the first time to our knowledge, feature reproduction at submicrometer size scales, eliminates several steps from conventional soft lithographic methods, and marks itself as a practical means for rapidly generating planar photonic structures that operate spectrally in the visible and the near IR telecommunication bands.
Original Publication Citation
H. Shah, D. Smith, Jr., J. Ballato, S. Foulger, P. Deguzman, and G. Nordin, "Direct Generation of Optical Diffractive Elements in Perfluorocyclobutane (PFCB) Polymers by Soft Lithography," IEEE Photonics Tech. Let. 12(12), 165 (2)
BYU ScholarsArchive Citation
Nordin, Gregory P.; Ballato, J.; Deguzman, P. C.; Foulger, S.; Shah, H.; and Smith, D., "Direct Generation of Optical Diffractive Elements in Perfluorocyclobutane (PFCB) Polymers by Soft Lithography" (2000). Faculty Publications. 1105.
https://scholarsarchive.byu.edu/facpub/1105
Document Type
Peer-Reviewed Article
Publication Date
2000-12-01
Permanent URL
http://hdl.lib.byu.edu/1877/483
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Language
English
College
Ira A. Fulton College of Engineering and Technology
Department
Electrical and Computer Engineering
Copyright Status
© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE
Copyright Use Information
http://lib.byu.edu/about/copyright/