Using silicon based microfabrication and materials, a photonic platform, capable of single bioparticle analysis, has been developed. This platform combines liquid and hollow core waveguides on the micron-scale (5 µm x 12 µm) to isolate femtoliter sized sample volumes. Fluorescence excitation and signals in the visible range are directed into and out of the sample volume at an orthogonal angle to maximize signal-to-noise. In order to guide light in a low-index material antiresonant reflecting optical waveguides (ARROWs) were incorporated into the platform. This thesis reveals the development path of these structures over several device generations including innovations in material, geometries, and fabrication techniques to increase detection sensitivity. As a result of these developments, this photonic platform has shown to successfully detect virus samples and other particles. This thesis also presents a new idea for increasing the signal to noise ratio (SNR) by incorporating Y-splitter devices into the design. Specifically, the 1 x 2 and 1 x 4 splitter structures can be used as orthogonal excitation points to the liquid core waveguide. When fluorescently tagged particles are introduced into the hollow core, these points create an optical signal that is correlated in time and space. The data collected by a photodetector can then be processed by an algorithm to increase SNR. Such advancements have shown to increase the SNR by 175 times.



College and Department

Ira A. Fulton College of Engineering and Technology; Electrical and Computer Engineering



Date Submitted


Document Type





Integrated optics, microfluidics, microfabrication, biophotonics, ARROWs