Journal of Undergraduate Research
Keywords
surface roughness, extreme ultraviolet light, XUV, photolithography, plasma diagnostics, astrophysics
College
Physical and Mathematical Sciences
Department
Physics and Astronomy
Abstract
Extreme ultraviolet (XUV) light is light with wavelengths between one and 60 nanometers. The shorter wavelengths of light in this range are on the same order of magnitude as atomic dimensions. Currently, XUV optics have many uses and even more potential applications in a variety of fields, such as photolithography, plasma diagnostics, and astrophysics.
Recommended Citation
Marx, Joshua and Turley, Steve
(2015)
"Determining Surface Roughness Using Extreme Ultraviolet Light,"
Journal of Undergraduate Research: Vol. 2015:
Iss.
1, Article 215.
Available at:
https://scholarsarchive.byu.edu/jur/vol2015/iss1/215