Journal of Undergraduate Research
Keywords
LIGA microstructures, microelectromechanical systems, MEMS
College
Ira A. Fulton College of Engineering and Technology
Department
Mechanical Engineering
Abstract
Microelectromechanical Systems (MEMS) is a rapidly developing field which uses technology similar to that used to carve out the millions of tiny channels found in today’s computer processors. MEMS, however, uses this technology to make mechanical structures and mechanisms instead of electrical pathways. My effort over the past eight months has been to research the developing LIGA MEMS design (an electromolding process), fabricate a test structure via the LIGA technology, and in the process establish a working relationship between Sandia National Laboratories California (a leader in MEMS) and BYU’s microengineering team.
Recommended Citation
Brough, Jordan E. and Howell, Dr. Larry
(2014)
"Developing Mechanisms as LIGA Microstructures,"
Journal of Undergraduate Research: Vol. 2014:
Iss.
1, Article 130.
Available at:
https://scholarsarchive.byu.edu/jur/vol2014/iss1/130