Infiltrated Carbon Nanotube MEMs: Understanding Adhesion Issues

Authors

Nicholas Morrill, Brigham Young University
Dr. Robert Davis, Brigham Young University

Keywords

infiltrated carbon nanotube, microelectric mechanical devices, MEMs, adhesion issues

College

Physical and Mathematical Sciences

Department

Physics and Astronomy

Abstract

Microelectric mechanical devices (MEMs) are structures on the micron scale that act as sensors and actuators. Devices such as these are used in familiar electronics such as iPhones and Nintendo Wii to sense motion. Current methods for MEMs fabrication are insufficient due to geometric design limitations, limited use of materials other than silicon, and cost. Research conducted at BYU has developed a new fabrication process overcoming these limitations and has already produced working devices1. This process includes patterned growth of Carbon Nanotubes (CNTs) on top of a sacrificial layer, followed by infiltration of appropriate materials and a release process enabling motion of the devices.

Recommended Citation

Morrill, Nicholas and Davis, Dr. Robert (2013) "Infiltrated Carbon Nanotube MEMs: Understanding Adhesion Issues," Journal of Undergraduate Research: Vol. 2013: Iss. 1, Article 2774.
Available at: https://scholarsarchive.byu.edu/jur/vol2013/iss1/2774