Journal of Undergraduate Research
Keywords
reactive gas sputtering, lithium compound, thin films
College
Physical and Mathematical Sciences
Department
Physics and Astronomy
Abstract
This research project reports the reactive gas sputtering deposition and structural characterization of lithium compound thin films (LiH and LiF). These materials, due to their low absorption, may have a role as spacer layers in soft x-ray multilayer reflectors. A multilayer is a periodic, alternating structure of a high density and low density (spacer layer) material stacked one on top of another. These materials reflect x-rays by the superposition of the multiple reflections that occur within the multilayer stack. These reflections can be modeled by Bragg’s condition, given as, n=2dsin, where n is an integer, is the wavelength, d is the bi-layer thickness of the multilayer stack, and is the incident angle.
Recommended Citation
Thompson, Gregory B. and Allred, Dr. David D.
(2013)
"REACTIVE GAS SPUTTERING OF LITHIUM COMPOUND THIN FILMS,"
Journal of Undergraduate Research: Vol. 2013:
Iss.
1, Article 2761.
Available at:
https://scholarsarchive.byu.edu/jur/vol2013/iss1/2761