DETERMINING OPTICAL CONSTANTS FOR ThO2 THIN FILMS SPUTTERED UNDER DIFFERENT BIAS VOLTAGES FROM 1.2 TO 6.5 eV BY SPECTROSCOPIC ELLIPSOMETRY

Authors

William Ray Evans, Brigham Young University
Dr. David Allred, Brigham Young University

Keywords

EUV, thin films, spectroscopic ellipsometry, optical constants

College

Physical and Mathematical Sciences

Department

Physics and Astronomy

Abstract

The Extreme Ultraviolet (EUV), that portion of the spectrum with photon energies of ~30 to ~300 eV is a scientifically interesting part of the spectrum for many reasons.

Recommended Citation

Evans, William Ray and Allred, Dr. David (2013) "DETERMINING OPTICAL CONSTANTS FOR ThO2 THIN FILMS SPUTTERED UNDER DIFFERENT BIAS VOLTAGES FROM 1.2 TO 6.5 eV BY SPECTROSCOPIC ELLIPSOMETRY," Journal of Undergraduate Research: Vol. 2013: Iss. 1, Article 2747.
Available at: https://scholarsarchive.byu.edu/jur/vol2013/iss1/2747