Strain in Polysilicon Microbeams: The Relationship Between Beam Geometry And The Nominal Strain at Failure

Authors

Susan Norma, Brigham Young University
Candland Bromley, Brigham Young University
Dr. Larry L. Howell, Brigham Young University

Keywords

polysilicon microbeams, beam geometry, nominal strain at failure

College

Ira A. Fulton College of Engineering and Technology

Department

Mechanical Engineering

Abstract

The objective of this research was to investigate the stress and strain behavior of microscopic cantilevered polycrystallin silicon (polysilicon) beams. A knowledge of this behavior is necessary to accomplish reliable mechanical design of micro-electro-mechanical systems (MEMS).

Recommended Citation

Norma, Susan; Bromley, Candland; and Howell, Dr. Larry L. (2013) "Strain in Polysilicon Microbeams: The Relationship Between Beam Geometry And The Nominal Strain at Failure," Journal of Undergraduate Research: Vol. 2013: Iss. 1, Article 1929.
Available at: https://scholarsarchive.byu.edu/jur/vol2013/iss1/1929