Photodefinable Microchannels Made With Spin-on Polymers and Short Sacrificial Etch Times

Authors

Christopher Carron, Brigham Young University
Dr. Aaron Hawkins, Brigham Young University

Keywords

photodefinable microchannels, polymers, sacrifical etching

College

Ira A. Fulton College of Engineering and Technology

Department

Electrical and Computer Engineering

Abstract

There are currently two basic ways to make microfluidic devices: sacrificial etching and wafer bonding. Each method has both advantages and disadvantages. Sacrificial etching is more consistent than wafer bonding and results in finer and more uniform microfluidic devices, but it is also much slower than wafer bonding and can take weeks or months to complete devices that wafer bonding can typically produce in just a few days. Figure 1 shows the differences between these two methods.

Recommended Citation

Carron, Christopher and Hawkins, Dr. Aaron (2013) "Photodefinable Microchannels Made With Spin-on Polymers and Short Sacrificial Etch Times," Journal of Undergraduate Research: Vol. 2013: Iss. 1, Article 1905.
Available at: https://scholarsarchive.byu.edu/jur/vol2013/iss1/1905