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Journal of Undergraduate Research

Keywords

microfabrication, electron sources, photodefinable

College

Ira A. Fulton College of Engineering and Technology

Department

Electrical and Computer Engineering

Abstract

Microfabrication of Electron Sources as it applies to Chemical Sensors has been a useful project. With the decreasing dimensions of the handheld mass spectrometer it is becoming increasingly more important to develop an on board electron source for localized source emission. This project has been undertaken as of November of 2005 and continues to be an important aspect of research. This project has proven to be one of larger proportions than envisioned at first outset. Despite all that has yet to be done progress has been made. Sacrificial Layers have been identified as well as potential metals for the electron source. Several structures have been constructed and have been included for demonstration of progressing technique.

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