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Journal of Undergraduate Research

Keywords

electroosmotic pumps, protein separation, ARROW structure

College

Ira A. Fulton College of Engineering and Technology

Department

Electrical and Computer Engineering

Abstract

Electroosmotic pumps have been fabricated and tested made with a thin-film deposition process compatible with standard silicon processing. This methodology relies upon chemical vapor deposition and chemical sacrificial etching to form long hollow fluid channels. Fabricating pumps in this way is attractive because they can be made on a variety of substrates with high-scale integration and can conveniently be combined with other planar thin-film components. These pumps have significantly smaller core diameters and separation between micropump channels than pumps made with alternative fabrication techniques. Flow rates were measured on these devices for different applied voltages.

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