Journal of Undergraduate Research
Keywords
electroosmotic pumps, protein separation, ARROW structure
College
Ira A. Fulton College of Engineering and Technology
Department
Electrical and Computer Engineering
Abstract
Electroosmotic pumps have been fabricated and tested made with a thin-film deposition process compatible with standard silicon processing. This methodology relies upon chemical vapor deposition and chemical sacrificial etching to form long hollow fluid channels. Fabricating pumps in this way is attractive because they can be made on a variety of substrates with high-scale integration and can conveniently be combined with other planar thin-film components. These pumps have significantly smaller core diameters and separation between micropump channels than pumps made with alternative fabrication techniques. Flow rates were measured on these devices for different applied voltages.
Recommended Citation
Conkey, Donald B. and Hawkins, Dr. Aaron R.
(2013)
"Fabrication and Characterization of Electroosmotic Pumps for Protein Separation and Integration into ARROW Structure,"
Journal of Undergraduate Research: Vol. 2013:
Iss.
1, Article 1892.
Available at:
https://scholarsarchive.byu.edu/jur/vol2013/iss1/1892