sensors, integrated optics devices
We demonstrate an in-plane photonic transduction method for microcantilevers, which have been widely investigated for sensor applications. In our approach the microcantilever is etched to form a single mode rib waveguide. Light propagates down the microcantilever and crosses a small gap at the free end of the microcantilever, some of which is captured by an asymmetrical multimode waveguide that terminates in a Y-branch. The Y-branch outputs are used to form a differential signal that is monotonically dependent on microcantilever deflection. The measured differential signal matches simulation when microcantilever rotation is properly accounted for. The measured differential signal sensitivity is 1.4 x 10-4 nm-1 and the minimum detectable deflection is 0.35 nm.
Original Publication Citation
J. W. Noh, R. Anderson, S. Kim, J. Cardenas, G. P. Nordin, "In-plane photonic transduction of silicon-on-insulator microcantilevers," Optics Express 16(16), pp. 12114-12123 (28). http://www.opticsexpress.org/abstract.cfm?uri=oe-16-16-12114.
BYU ScholarsArchive Citation
Anderson, Ryan; Kim, Seunghyun; Nordin, Gregory P.; Wook Noh, Jong; and Cardenas, Jaime, "In-Plane Photonic Transduction of Silicon-On-Insulator Microcantilevers" (2008). All Faculty Publications. 896.
Optical Society of America
Ira A. Fulton College of Engineering and Technology
Electrical and Computer Engineering
© 2008 Optical Society of America
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