microcantilever, array, simultaenous readout, phtonoic transduction, waveguide


We demonstrate a microcantilever array with an in-plane photonic transduction method for simultaneous readout of each microcantilever. The array is fabricated on a silicon-on-insulator substrate. Rib waveguides in conjunction with a compact waveguide splitter network comprised of trench-based splitters and trench-based bends route light from a single optical input to each microcantilever on the chip. Light propagates down a rib waveguide integrated into the microcantilever and, at the free end of the microcantilever, crosses a small gap. Light is captured in static asymmetric multimode waveguides that terminate in Y-branches, the outputs of which are imaged onto an InGaAs line scan camera. A differential signal for each microcantilever is simultaneously formed from the two outputs of the corresponding Y-branch. We demonstrate that reasonable signal uniformity is obtained with a scaled differential signal for seven out of nine surviving microcantilevers in an array.

Original Publication Citation

W. Hu, R. Anderson, Y. Qian, J. Song, J.W. Noh, S. Kim, G.P. Nordin, "Demonstration of microcantilever array with simultaneous readout using in-plane photonic transduction method," Rev. Sci. Instr. 8, 8511, pp. 1-7 (29).

Document Type

Peer-Reviewed Article

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Permanent URL


American Institute of Physics




Ira A. Fulton College of Engineering and Technology


Electrical and Computer Engineering