thermal actuators, modeling, design, MEMS
The purpose of this chapter is to provide fundamental background for the design of thermomechanical microactuators. Actuation has been a particularly challenging aspect of microsystem development. Many actuation approaches used at the macro level, such as hydraulics, pneumatics, electric motors, internal combustion engines and turbines, are either too difficult to fabricate at the micro level or do not work well at that scale. Electrostatic attraction is one approach that has been widely used for actuation of microsystems; however, electrostatic actuators tend to have high voltage requirements and low output force capabilities. While electrostatic actuation is suitable for many applications, some systems require either lower voltages to be compatible with on-chip electronics or higher output forces.
Original Publication Citation
Howell, L., McLain, T., Baker, M., and Lott, C. Techniques in the Design of Thermomechanical Microactuators, Chapter 7, MEMS/NEMS Handbook, Techniques and Applications, vol. 4, Editor: C.T. Leondes, Springer, pp. 187-200, 2006
BYU ScholarsArchive Citation
Howell, Larry L.; McLain, Timothy W.; Baker, Michael S.; and Lott, Christian D., "Techniques in the Design of Thermomechanical Microactuators" (2006). All Faculty Publications. 1510.
Ira A. Fulton College of Engineering and Technology
The final publication is available at Springer via http://dx.doi.org/10.1007/0-387-25786-1_31
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