This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the resulting mechanisms were tested. A compliant XYZ Micromanipulator was also designed to reduce backlash and binding. In addition, several other MEMS positioners were fabricated and tested: the Micropositioning Platform Mechanism (MPM), the Ortho-planar Twisting Micromechanism (OTM), and the Ortho-planar Spring Micromechanism (OSM).
College and Department
Ira A. Fulton College of Engineering and Technology; Mechanical Engineering
BYU ScholarsArchive Citation
Jensen, Kimberly A., "Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning" (2003). Theses and Dissertations. 230.
MEMS, microelectromechanical systems, micropositioning, compliant mechanisms, out-of-plane, ortho-planar, surface micromachining, thermal actuation, thermomechanical in-plane microactuator, TIM