Keywords

LDBM, microrelays, thermal actuators, linear displacement, relay performance

Abstract

This paper investigates the Linear Displacement Bistable Mechanism (LDBM) for use in microrelays. The LDBM, thermal actuators, and contacts are integrated to demonstrate a relay design. The performance of the relay is characterized using relay performance metrics, including size (1.92 mm2), contact force (23.4 μN), switching time (340 μs), breakdown voltage (> 475 V), and isolation (> 235 V). The actuation voltage and current are 11 V and 85 mA, respectively. AC characteristics, including contact-to-contact crosstalk and AC isolation are also measured. The testing results demonstrate that it is feasible to use the LDBM as a microrelay and that it has potential for use in future applications.

Original Publication Citation

Gomm, T., Howell, L.L., and Selfridge, R.H., "In-Plane Linear-Displacement Bistable Microrelay," Journal of Micromechanics and Microengineering, Institute of Physics, Vol. 12, pp. 257-264, 22.