Keywords

gratings, optical polymers, PFCB, soft lithography

Abstract

Optically diffractive line gratings with 0.58- m feature sizes have been generated in 100- m perfluorocyclobutane (PFCB) polymer films by direct micromolding using only a silicon master. Strong reflectivities from the green to red portions of the visible spectrum, depending on incident beam angle, were observed with 3 dB bandwidths of approximately 30 nm. This negative mold-free technique permits, for the first time to our knowledge, feature reproduction at submicrometer size scales, eliminates several steps from conventional soft lithographic methods, and marks itself as a practical means for rapidly generating planar photonic structures that operate spectrally in the visible and the near IR telecommunication bands.

Document Type

Peer-Reviewed Article

Publication Date

2000-12-01

Permanent URL

http://hdl.lib.byu.edu/1877/483

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Source

H. Shah, D. Smith, Jr., J. Ballato, S. Foulger, P. Deguzman, and G. Nordin, "Direct Generation of Optical Diffractive Elements in Perfluorocyclobutane (PFCB) Polymers by Soft Lithography," IEEE Photonics Tech. Let. 12(12), 165 (2)

Language

English

College

Ira A. Fulton College of Engineering and Technology

Department

Electrical and Computer Engineering